Micromagnetic Devices Fabricated by Micromachining Techniques.
نویسندگان
چکیده
منابع مشابه
Development of magnetic materials and processing techniques applicable to integrated micromagnetic devices
In this research, electroplated magnetically isotropic and anisotropic soft alloys and screen-printed soft ferrites applicable to micromachined micromagnetic devices are fabricated and characterized using in situ measurement techniques. Appropriate magnetic materials and deposition methods, such as electroplating and screen-printing techniques, are examined and material test structures are fabr...
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ژورنال
عنوان ژورنال: Journal of the Japan Society of Powder and Powder Metallurgy
سال: 1995
ISSN: 0532-8799,1880-9014
DOI: 10.2497/jjspm.42.1145